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Lam Research Corporation - In 2011, Novellus introduced the VECTOR® Extreme TEOS xT system - a plasma enhanced chemical vapor deposition (PECVD) system that broke boundaries for throughput and nanoscale defectivity levels.
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Lam Research on X: "Lam introduced VECTOR® ALD Oxide deposition product & Kiyo® F Series etch system for #MultiplePatterning in 2014! https://t.co/jwDba6rCw5" / X
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Lam Research plays long game, nurturing innovation at Tualatin site that employs thousands - oregonlive.com
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